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SCIL® nano-imprint module - Philips / SÜSS MicroTec AG
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A design-in of the SCIL® nano-imprint technology was developed for integration in the MA6 of SÜSS MicroTec.
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The SCIL® technology makes use of a glass groove plate to generate a wave to imprint a stamp to a substrate. By means of SoLgel or UV-curing this imprint will be replicated. This technology was implemented on a Mask Aligner (MA6) of SÜSS MicroTec and is commercially available now. MI-Partners has designed this module existing of a glass groove plate, a custom pneumatic connector and a pneumatic supply cabinet. |
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Challenges: |
- Thorough understanding of process to define the boundaries for the mechanical design
- Transfer from research model to industrial prototype
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Key Competences: |
- Precision Engineering
- Engineering with Glass Ceramics
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Cooperation: |
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