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Actuator Test Rig
Nano precision X-Y-Rz stage
Through-wall maglev stage
Active Vibration Isolation
MPI head scanner
Gantry stage fair demonstrator
Force cancellation demonstrator
Glass test setup
Assembly tool
Seismic Vibrator
Hybrid Actuator
Automatic Bookstack Unloader
Over Actuated Demonstrator
Trailer design
Diffractive element tester
→ SCIL® nano-imprint module

SCIL® nano-imprint module - Philips / SÜSS MicroTec AG

A design-in of the SCIL® nano-imprint technology was developed for integration in the MA6 of SÜSS MicroTec.

The SCIL® technology makes use of a glass groove plate to generate a wave to imprint a stamp to a substrate. By means of SoLgel or UV-curing this imprint will be replicated. This technology was implemented on a Mask Aligner (MA6) of SÜSS MicroTec and is commercially available now.

MI-Partners has designed this module existing of a glass groove plate, a custom pneumatic connector and a pneumatic supply cabinet.

  • Thorough understanding of process to define the boundaries for the mechanical design
  • Transfer from research model to industrial prototype
Key Competences:
  • Precision Engineering
  • Engineering with Glass Ceramics