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Actuator Test Rig - ASML
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A highly accurate test set-up, with extreme force range-resolution-ratio, for testing new actuator concepts was developed.
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For future wafer scanners ASML Research Mechatronics is developing new actuator concepts. For characterizing the behaviour of new types of actuators MI-Partners developed a test rig. |
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Challenges: |
- Extreme range-resolution-ratio force measurement (1kN +/- 1mN)
- Time synchronous monitoring of all type of sensor data
- High required servo bandwidths (>200Hz)
- Non rigid body behavior between actuator and sensor
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Key Competences: |
- Prediction of frequency response functions
- Custom air bearing design (first suspension frequency on air film >700Hz), prediction of air film stiffness and verification measurements
- xPC Motion Control development platform for flexible implementation of advanced control algorithms
- Safety implementation and testing (grounding, bounding)
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Results: |
- High resolution/low noise data acquisition with analogue sensors (16 bit ADC) and digital encoders (5 nm resolution)
- Closed-loop sample frequency of 10 kHz
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Cooperation: |
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