Actuator Test Rig
ASML
A highly accurate test setup, with extreme force range-resolution-ratio, for testing new actuator concepts was developed.
For future wafer scanners ASML Research Mechatronics is developing new actuator concepts. For characterizing the behaviour of new types of actuators MI-Partners developed a test rig.
Challenges
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Extreme range-resolution-ratio force measurement (1kN +/- 1mN)
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Time synchronous monitoring of all type of sensor data
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High required servo bandwidths (>200Hz)
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Non rigid body behavior between actuator and sensor
Key Competences
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Prediction of frequency response functions
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Custom air bearing design (first suspension frequency on air film >700Hz), prediction of air film stiffness and verification measurements
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Simulink Real-time Motion Control development platform for flexible implementation of advanced control algorithms
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Safety implementation and testing (grounding, bounding)
Results
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High resolution/low noise data acquisition with analogue sensors (16 bit ADC) and digital encoders (5 nm resolution)
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Closed-loop sample frequency of 10 kHz
Cooperation
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Simex Technology for air bearing design
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NTS Mechatronics for cleanroom facilities and assembly support