Actuator Test Rig

ASML

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A highly accurate test setup, with extreme force range-resolution-ratio, for testing new actuator concepts was developed.

For future wafer scanners ASML Research Mechatronics is developing new actuator concepts. For characterizing the behaviour of new types of actuators MI-Partners developed a test rig.

Challenges

  • Extreme range-resolution-ratio force measurement (1kN +/- 1mN)

  • Time synchronous monitoring of all type of sensor data

  • High required servo bandwidths (>200Hz)

  • Non rigid body behavior between actuator and sensor

Key Competences

  • Prediction of frequency response functions

  • Custom air bearing design (first suspension frequency on air film >700Hz), prediction of air film stiffness and verification measurements

  • Simulink Real-time Motion Control development platform for flexible implementation of advanced control algorithms

  • Safety implementation and testing (grounding, bounding)

Results

  • High resolution/low noise data acquisition with analogue sensors (16 bit ADC) and digital encoders (5 nm resolution)

  • Closed-loop sample frequency of 10 kHz

Cooperation

  • Simex Technology for air bearing design

  • NTS Mechatronics for cleanroom facilities and assembly support

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