Assembly tool
Client confidential
For a high-tech application, several small components need to be aligned accurately and glued together.
From concept to fully detailed drawings, MI-Partners has designed and built a specialized tool to perform this assembly. The tool has been assembled and tested together with our customer in their cleanroom facilities.
Challenges
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High positioning accuracy in X/Y/RZ (<100nm total budget), highly compliant RX/RY/Z to ensure flat contact of components.
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Optics adjustment and calibration strategy.
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Design of chucks for all different components, with vacuum clamping.
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Clean room compatible.
Key Competences
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Construction principles for precision engineering.
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System architecture (dynamic and thermal stability).
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Error and tolerance budgeting.
Results
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Alignment stage with 30nm resolution and 1.5e7 N/m stiffness in X/Y/RZ.
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Ratio RX/RY/Z-stiffness vs. X/Y/RZ-stiffness 1:125.000.
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Highly adjustable optics box.
Cooperation
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Customer (specifications and review).
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PMBearings (development of custom long-stroke stage).