Assembly tool

Client confidential

For a high-tech application, several small components need to be aligned accurately and glued together.

From concept to fully detailed drawings, MI-Partners has designed and built a specialized tool to perform this assembly. The tool has been assembled and tested together with our customer in their cleanroom facilities.

Challenges

  • High positioning accuracy in X/Y/RZ (<100nm total budget), highly compliant RX/RY/Z to ensure flat contact of components.

  • Optics adjustment and calibration strategy.

  • Design of chucks for all different components, with vacuum clamping.

  • Clean room compatible.

Key Competences

  • Construction principles for precision engineering.

  • System architecture (dynamic and thermal stability).

  • Error and tolerance budgeting.

Results

  • Alignment stage with 30nm resolution and 1.5e7 N/m stiffness in X/Y/RZ.

  • Ratio RX/RY/Z-stiffness vs. X/Y/RZ-stiffness 1:125.000.

  • Highly adjustable optics box.

Cooperation

  • Customer (specifications and review).

  • PMBearings (development of custom long-stroke stage).

For more information about our services, please contact us