A new linear hybrid actuator for active force cancellation was developed.
In precision machines vibration isolation systems isolate the machine components from the surroundings. For suppressing the reaction forces originating in the positioning systems of the machine itself a novel actuator is developed.
Realization of an actuator with low stiffness, high force density and low power dissipation
Compensation of negative stiffness caused by hybrid actuator configuration
New actuator design capable of generating 300N with 300At in total
Actuator constant of 10500 N2/W
Magnetic finite element actuator design
Low hysteresis material selection
Magnetic Innovations for coil and yoke manufacturing