Polymer damper

ASML

In close cooperation with GMT, a polymer damper with an extremely high damping ratio of 50% has been developed and is currently produced in volume.

To apply damping to the suspension of an optical module used in next generation lithography tools, a dedicated polymer damper has been developed. To reach the extremely high damping values, a new polymer material was developed in close cooperation with GMT. The dampers are produced in volume and their performance has been verified. MI-Partners has developed in-depth knowledge regarding the design of polymer dampers. Models have been developed such that these dampers can be developed and produced with a first-time-right strategy in future projects.

Challenges

  • Achieving extremely high damping by passive means

  • Material development with 50 % internal damping at low frequencies

  • Material characterization and establishing FEM models

  • System level modeling with high predictability

  • Series production with high predictability

  • Clean room compatibility

Key Competences

  • Predictive modeling, dynamic system modeling

  • FEM models of polymer material

  • Design rules for polymer dampers

  • Application and production experience

  • Measurement setup to characterize dynamic properties (stiffness, damping) of material and entire dampers

Results

  • Entire suspension with dedicated metal spring and dedicated polymer damper

  • Verification of dynamic properties (stiffness, damping) of entire suspension

  • Modeling and design competence for first-time-right damper development

  • Cooperation with GMT to produce customer specific dampers

  • Predictive modeling on system and damper level with high predictability

Cooperation

  • GMT Gummi-Metall Technik GmbH.

For more information about our services, please contact us

Habraken 1199
5507 TB Veldhoven
The Netherlands

Tel.: +31(0)40-2914920
E-mail: info@mi-partners.nl