SCIL® nano-imprint module
Philips / SÜSS MicroTec AG
A design-in of the SCIL® nano-imprint technology was developed for integration in the MA6 of SÜSS MicroTec.
The SCIL® technology makes use of a glass groove plate to generate a wave to imprint a stamp to a substrate. By means of SoLgel or UV-curing this imprint will be replicated. This technology was implemented on a Mask Aligner (MA6) of SÜSS MicroTec and is commercially available now.
MI-Partners has designed this module existing of a glass groove plate, a custom pneumatic connector and a pneumatic supply cabinet.
Challenges
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Thorough understanding of process to define the boundaries for the mechanical design
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Transfer from research model to industrial prototype
Key Competences
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Precision Engineering
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Engineering with Glass Ceramics
Cooperation
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with Philips Research and Louwers Glas