SCIL® nano-imprint module
Philips / SÜSS MicroTec AG
A design-in of the SCIL® nano-imprint technology was developed for integration in the MA6 of SÜSS MicroTec.
The SCIL® technology makes use of a glass groove plate to generate a wave to imprint a stamp to a substrate. By means of SoLgel or UV-curing this imprint will be replicated. This technology was implemented on a Mask Aligner (MA6) of SÜSS MicroTec and is commercially available now.
MI-Partners has designed this module existing of a glass groove plate, a custom pneumatic connector and a pneumatic supply cabinet.
Thorough understanding of process to define the boundaries for the mechanical design
Transfer from research model to industrial prototype
Engineering with Glass Ceramics
with Philips Research and Louwers Glas